Atmospheric sintering furnace for electrostatic chucks (ESC)
Improving the reproducibility of ESC firing and the efficiency of condition setting with a reducing atmosphere of N₂ + H₂ and dew point control.
This is a multi-atmosphere electric furnace specialized for the sintering process of electrostatic chucks (ESC). It supports a high-temperature range of 1600°C (Max 1650°C) and can operate in N₂ and N₂ + H₂ reducing atmospheres. Additionally, it achieves dry/wet switching (optional) through gas humidification by Wetter, enhancing the reproducibility of surface condition adjustments through dew point (pH₂O) control. Since the atmosphere can be switched within the same chamber, it reduces waiting, transportation, and exposure to outside air associated with process segmentation, thereby minimizing the risk of reattachment of particles and moisture. This contributes to reducing the labor required for establishing ESC sintering conditions and stabilizing quality.
- Company：サーモニックENG
- Price：Other
